中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2011, vol.29, no.1 2011, vol.29, no.2 2011, vol.29, no.3 2011, vol.29, no.4 2011, vol.29, no.5 2011, vol.29, no.6

题名作者出版年年卷期
Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectricsH. Sinha; M. T. Nichols; A. Sehgal; M. Tomoyasu; N. M. Russell; G. A. Antonelli; Y. Nishi; J. L. Shohet20112011, vol.29, no.1
Critical review: Plasma-surface reactions and the spinning wall methodV. M. Donnelly; J. Guha; L. Stafford20112011, vol.29, no.1
Formation of pyrite (FeS_2) thin films by thermal sulfurization of dc magnetron sputtered ironR. J. Soukup; P. Prabukanthan; N. J. Ianno; A. Sarkar; C. A. Kamler; D. G. Sekora20112011, vol.29, no.1
Flow of binary gas mixtures through small sampling orificesRainer Johnsen; B. K. Chatterjee20112011, vol.29, no.1
Synchrotron photoemission studies on reconstructed strained surfacesHidong Kim; Huiting Li; Ganbat Duvjir; Jae M. Seo20112011, vol.29, no.1
Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technologyY. P. Purandare; A. P. Ehiasarian; P. Eh. Hovsepian20112011, vol.29, no.1
Rolling contact fatigue in high vacuum using ion plated nickel-copper-silver solid lubricationMike Danyluk; Anoop Dhingra20112011, vol.29, no.1
Spatially resolved measurements of ion density and electron temperature in a dual-frequency capacitively coupled plasma by complete floating double probe techniqueXiang-Zhan Jiang; Yong-Xin Liu; Shuo Yang; Wen-Qi Lu; Zhen-Hua Bi; Xiao-Song Li; You-Nian Wang20112011, vol.29, no.1
Design and fabrication of a novel microgripper with four-point contact fingersXiaohu Zheng; Ji-Kwan Kim; Dong-Weon Lee20112011, vol.29, no.1
Correlation of plasma characteristics to etch rate and via sidewall angle in a deep reactive ion etch system using Langmuir probe and optical emission spectroscopyS. P. Koirala; I. Awaah; S. L. Burkett; M. H. Gordon20112011, vol.29, no.1
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