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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2009, vol.27, no.1
2009, vol.27, no.2
2009, vol.27, no.3
2009, vol.27, no.4
2009, vol.27, no.5
2009, vol.27, no.6
题名
作者
出版年
年卷期
Preferential growth of helium-doped Ti films deposited by magnetron sputtering
Lei Zhang; L. Q. Shi; Z. J. He; B. Zhang; L. B. Wang
2009
2009, vol.27, no.6
Simulation of gas flow through tubes of finite length over the whole range of rarefaction for various pressure drop ratios
S. Varoutis; D. Valougeorgis; F. Sharipov
2009
2009, vol.27, no.6
Effects of type of reactor, crystallinity of SiC, and NF_3 gas pressure on etching rate and smoothness of SiC surface using NF_3 gas plasma
A. Tasaka; H. Yamada; T. Nonoyama; T. Kanatani; Y. Kotaka; T. Tojo; M. Inaba
2009
2009, vol.27, no.6
Analysis of carbon in SrTiO_3 grown by hybrid molecular beam epitaxy
Bharat Jalan; Joel Cagnon; Thomas E. Mates; Susanne Stemmer
2009
2009, vol.27, no.6
Structure and properties of ZrN doped diamondlike carbon films prepared by pulsed bias arc ion plating
H. K. Li; G. Q. Lin; C. Dong
2009
2009, vol.27, no.6
Transmission electron microscopy specimen preparation perpendicular to the long axis of high aspect ratio features
R. B. Irwin; A. Anciso; P. J. Jones; A. L. Glenn; B. L. Williams; S. Sridhar; S. Arshad
2009
2009, vol.27, no.6
Synthesis and hydrogen gas sensing properties of ZnO wirelike thin films
Nguyen Le Hung; Eunseong Ahn; Seongyong Park; Hooncheol Jung; Hyojin Kim; Soon-Ku Hong; Dojin Kim; Chanyong Hwang
2009
2009, vol.27, no.6
UV detection based on a ZnO/LiNbO_3 layered surface acoustic wave oscillator circuit
Ching-Liang Wei; Ying-Chung Chen; Jiun-Lin Fu; Kuo-Sheng Kao; Da-Long Cheng; Chien-Chuan Cheng
2009
2009, vol.27, no.6
Ferroelectric polarization dependent interactions at Pd-LiNbO_3(0001) interfaces
Mosha H. Zhao; Dawn A. Bonnell; John M. Vohs
2009
2009, vol.27, no.6
Modeling of the angular dependence of plasma etching
Wei Guo; Herbert H. Sawin
2009
2009, vol.27, no.6
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