中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2009, vol.27, no.1 2009, vol.27, no.2 2009, vol.27, no.3 2009, vol.27, no.4 2009, vol.27, no.5 2009, vol.27, no.6

题名作者出版年年卷期
Analysis of controlled mixed-phase (amorphous+microcrystalline) silicon thin films by real time spectroscopic ellipsometryN. J. Podraza; Jing Li; C. R. Wronski; E. C. Dickey; R. W. Collins20092009, vol.27, no.6
Characterizations of Ga-doped ZnO films on Si (111) prepared by atmospheric pressure metal-organic chemical vapor depositionYen-Chin Huang; Zhen-Yu Li; Li-Wei Weng; Wu-Yih Uen; Shan-Ming Lan; Sen-Mao Liao; Tai-Yuan Lin; Yu-Hsiang Huang; Jian-Wen Chen; Tsun-Neng Yang; Chin-Chen Chiang20092009, vol.27, no.6
Effects of Si capping layers on the properties of ultrathin Co/Ir(111) filmsJ. S. Tsay; Y. C. Liou; C. M. Chen; W. Y. Chan20092009, vol.27, no.6
Kinetic modeling of the effect of electron beam pulse duration on abatement of carbon tetrafluoride using O_2 as an additive gasSusumu Kato; Isao Okuda; Eiichi Takahashi; Yuji Matsumoto20092009, vol.27, no.6
Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering systemSamuel D. Ekpe; Francisco J. Jimenez; David J. Field; Martin J. Davis; Steven K. Dew20092009, vol.27, no.6
Time of flight secondary ion mass spectroscopy studies of poly(allyl methacrylate-g-dimethylsiloxane) copolymers using cryogenic sample handling techniques: Effects of hydration on surface chemical structure and surface chain length distributionDaniel J. Hook; Lu Chen; Paul L. Valint; Joseph A. Gardella20092009, vol.27, no.6
Mechanisms for plasma etching of HfO_2 gate stacks with Si selectivity and photoresist trimmingJuline Shoeb; Mark J. Kushner20092009, vol.27, no.6
Development of copper-alloy Matsumoto-Ohtsuka-type vacuum flanges and its application to accelerator beam pipesY. Suetsugu; M. Shirai; M. Ohtsuka; T. Nishidono; K. Watanabe; Y. Suzuki; M. Tsuchiya; A. Yonemoto; K. Sennyu; H. Hara20092009, vol.27, no.6
Effects of pulsed sputtering frequency on the uniformity of Al:ZnO's transparent conductive oxide properties for solar cell applicationsWonkyun Yang; Junghoon Joo20092009, vol.27, no.6
Zn-doped CuAlS_2 transparent p-type conductive thin films deposited by pulsed plasma depositionMing Yang; Yinghua Wang; Guifeng Li; Zhan Shi; Qun Zhang20092009, vol.27, no.6
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