中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2009, vol.27, no.1 2009, vol.27, no.2 2009, vol.27, no.3 2009, vol.27, no.4 2009, vol.27, no.5 2009, vol.27, no.6

题名作者出版年年卷期
Chemical and structural properties of atomic layer deposited La_2O_3 films capped with a thin Al_2O_3 layerX. L. Li; D. Tsoutsou; G. Scarel; C. Wiemer; S. C. Capelli; S. N. Volkos; L. Lamagna; M. Fanciulli20092009, vol.27, no.2
Relatively low temperature synthesis of hexagonal tungsten carbide films by N doping and its effect on the preferred orientation, phase transition, and mechanical propertiesY. D. Su; C. Q. Hu; C. Wang; M. Wen; W. T. Zheng20092009, vol.27, no.2
Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer CrAlYN/CrN physical vapor deposition coatingsG. Safran; C. Reinhard; A. P. Ehiasarian; P. B. Barna; L. Szekely; O. Geszti; P. Eh. Hovsepian20092009, vol.27, no.2
Thermal-mechanical modeling of nodular defect embedded within multilayer coatingsXiulan Ling; Jianda Shao; Zhengxiu Fan20092009, vol.27, no.2
Photon emission during fracture of carbon materialsK. Yasuda; K. Yamamoto; T. Shiota; Y. Matsuo20092009, vol.27, no.2
Chemistry in long residence time fluorocarbon plasmasS. P. Sant; C. T. Nelson; L. J. Overzet; M. J. Goeckner20092009, vol.27, no.2
Plasma etching of Hf-based high-k thin films. Part I. Effect of complex ions and radicals on the surface reactionsRyan M. Martin; Jane P. Chang20092009, vol.27, no.2
Plasma etching of Hf-based high-k thin films. Part II. Ion-enhanced surface reaction mechanismsRyan M. Martin; Hans-Olof Blom; Jane P. Chang20092009, vol.27, no.2
Plasma etching of Hf-based high-k thin films. Part III. Modeling the reaction mechanismsRyan M. Martin; Jane P. Chang20092009, vol.27, no.2
Growth modes In metal-organic molecular beam epitaxy of TiO_2 on r-plane sapphireBharat Jalan; Roman Engel-Herbert; Joel Cagnon; Susanne Stemmer20092009, vol.27, no.2
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