中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2009, vol.27, no.1 2009, vol.27, no.2 2009, vol.27, no.3 2009, vol.27, no.4 2009, vol.27, no.5 2009, vol.27, no.6

题名作者出版年年卷期
Effect of copper emitted from wafers on etch rates of insulator films in capacitively coupled fluorocarbon plasmaShin-ichi Imai20092009, vol.27, no.1
Ultrahigh-frequency microplasma jet as a low-power, high-density, and localized ions/radicals sourceHiroyuki Miyazoe; Masaki Sai; Sven Stauss; Kazuo Terashima20092009, vol.27, no.1
Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactorDougyong Sung; Sangmin Jeong; Youngmin Park; Vladimir N. Volynets; Andrey G. Ushakov; Gon-Ho Kim20092009, vol.27, no.1
Numerical study of the sputtering in a dc magnetronIvan Kolev; Annemie Bogaerts20092009, vol.27, no.1
Growth and characterization of TiAlN/CrAlN superlattices prepared by reactive direct current magnetron sputteringHarish C. Barshilia; B. Deepthi; K. S. Rajam; Kanwal Preet Bhatti; Sujeet Chaudhary20092009, vol.27, no.1
Plasma atomic layer etching using conventional plasma equipmentAnkur Agarwal; Mark J. Kushner20092009, vol.27, no.1
Selective formation of competitive c-axis and a-axis oriented LiNbO{sub}3 epitaxial films on Al{sub}2O{sub}3(1120)Housei Akazawa20092009, vol.27, no.1
Analysis of surface roughness and its relationship with photoluminescence properties of silicon-rich oxide filmsJ. A. Luna-Lopez; A. Morales-Sanchez; M. Aceves-Mijares; Z. Yu; C. Dominguez20092009, vol.27, no.1
Crystallographic texture control of sputtered HfN thin films using low oxygen partial pressuresD. Deniz; J. M. E. Harper20092009, vol.27, no.1
Second-order resonant ZnO-based film bulk acoustic resonator devices and thermal techniques to improve their resonant characteristicsLinh Mai; Van-Su Pham; Giwan Yoon20092009, vol.27, no.1
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