中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2009, vol.27, no.1 2009, vol.27, no.2 2009, vol.27, no.3 2009, vol.27, no.4 2009, vol.27, no.5 2009, vol.27, no.6

题名作者出版年年卷期
Low temperature grown polycrystalline La_(0.7)Sr_(0.3)MnO_3 thin films on amorphous SiO_2 substrates by rf magnetron sputteringSun Gyu Choi; A. Sivasankar Reddy; Hyung-Ho Park; Woo Seok Yang; Hojun Ryu; Byoung-Gon Yu20092009, vol.27, no.4
Collisionless gas flows over a flat cryogenic pump plateChunpei Cai; Khaleel Khasawneh20092009, vol.27, no.4
Surface effects on the luminescence degradation of hydride vapor-phase epitaxy-grown GaN induced by electron-beam irradiationY. Wang; B. Dierre; T. Sekiguchi; Y. Z. Yao; X. L. Yuan; F. J. Xu; B. Shen20092009, vol.27, no.4
Fabrication of surface plasmon waveguides on thin CYTOP membranesNorman Fong; Pierre Berini; R. Niall Tait20092009, vol.27, no.4
Large crystal grain niobium thin films deposited by energetic condensation in vacuum arcXin Zhao; A.-M. Valente-Feliciano; C. Xu; R. L. Geng; L. Phillips; C. E. Reece; K. Seo; R. Crooks; M. Krishnan; A. Gerhan; B. Bures; K. Wilson Elliott; J. Wright20092009, vol.27, no.4
Studies on hard TaN thin film deposition by R C-Mag techniqueKrishna Valleti20092009, vol.27, no.4
Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate modelS. P. Sant; C. T. Nelson; L. J. Overzet; M. J. Goeckner20092009, vol.27, no.4
Effect of cesium assistance on the electrical and structural properties of indium tin oxide films grown by magnetron sputteringJaewon Song; Cheol Seong Hwang; Sung Jin Park; Neung Ku Yoon20092009, vol.27, no.4
Thermal stability of sputter deposited nanomosaic rutile TiO_2Carolyn Rubin Aita20092009, vol.27, no.4
Rotation magnet sputtering: Damage-free novel magnetron sputtering using rotating helical magnet with very high target utilizationTetsuya Goto; Takaaki Matsuoka; Tadahiro Ohmi20092009, vol.27, no.4
123456789



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024