中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2013, vol.31, no.1 2013, vol.31, no.2

题名作者出版年年卷期
Interface layer in hafnia/Si films as a function of ALD cyclesPierre-Giovanni Mani-Gonzalez; Milton-Oswaldo Vazquez-Lepe; Francisco Espinosa-Magana; Alberto Herrera-Gomez20132013, vol.31, no.1
Modeling of inductively coupled plasma Ar/Cl_2/N_2 plasma discharge: Effect of N_2 on the plasma propertiesRomain Chanson; Ahmed Rhallabi; Marie Claude Fernandez; Christophe Cardinaud; Jean Pierre Landesman20132013, vol.31, no.1
Can surface cracks and unipolar arcs explain breakdown and gradient limits?Zeke Insepov; Jim Norem20132013, vol.31, no.1
Reorganization of graphite surfaces into carbon micro- and nanoparticles under high flux hydrogen plasma bombardmentKirill Bystrov; Lenze van der Vegt; Gregory De Temmerman; Cecile Arnas; Laurent Marot20132013, vol.31, no.1
Low emissivity high-temperature tantalum thin film coatings for silicon devicesVeronika Rinnerbauer; Jay J. Senkevich; John D. Joannopoulos; Marin Soljacic; Ivan Celanovic; Robert R. Harl; Bridget R. Rogers20132013, vol.31, no.1
Effects of the gas ambient in thermal activation of Mg-doped p-GaN on Hall effect and photoluminescenceWei Lu; David Aplin; Arthur R. Clawson; Paul K. L. Yu20132013, vol.31, no.1
Influence of inert gases on the reactive high power pulsed magnetron sputtering process of carbon-nitride thin filmsSusann Schmidt; Zsolt Czigany; Grzegorz Greczynski; Jens Jensen; Lars Hultman20132013, vol.31, no.1
Photoluminescence characterization of polythiophene films incorporated with highly functional molecules such as metallophthalocyanineHiroaki Kobe; Kazumasa Ohnaka; Hitoshi Kato; Susumu Takemura; Kazuhiro Shimada; Tomoyasu Hiramatsu; Kazunori Matsui20132013, vol.31, no.1
Direct comparison of spectroscopic data with cluster calculations of plutonium dioxide and uranium dioxideJ. G. Tobin; S. W. Yu; B. W. Chung; M. V. Ryzhkov; A. Mirmelstein20132013, vol.31, no.1
Magnetically coupled ultrahigh vacuum manipulator with a sample grabberSeong Heon Kim; Alex de Lozanne20132013, vol.31, no.1
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