中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2007, vol.25, no.1 2007, vol.25, no.2 2007, vol.25, no.3 2007, vol.25, no.4 2007, vol.25, no.5 2007, vol.25, no.6

题名作者出版年年卷期
Crystalline alumina coatings by reactive ac magnetron sputteringAtul Khanna; Deepak G. Bhat20072007, vol.25, no.2
Measurement of cooling rates of a superstrate cooling apparatus for an integrated in-line manufacturing process for thin-film photovoltaic devicesRobert A. Enzenroth; Kurt L. Barth; W. S. Sampath; V. Manivannan20072007, vol.25, no.2
Influence of the external solenoid coil arrangement and excitation mode on plasma characteristics and target utilization in a dc-planar magnetron sputtering systemX. B. Zhang; J. Q. Xiao; Z. L. Pei; J. Gong; C. Sun20072007, vol.25, no.2
Quantitative evaluation of film thickness uniformity: Application to off-axis magnetron source onto a rotating substrateX. S. Du; Y. D. Jiang; J. S. Yu; J. Li; G. Z. Xie20072007, vol.25, no.2
On the phase shift of reflection high energy electron diffraction intensity oscillations during Ge(001) homoepitaxy by molecular beam epitaxyByungha Shin; John P. Leonard; James W. McCamy; Michael J. Aziz20072007, vol.25, no.2
Effects of processing parameters on electroluminescence of rf magnetron sputter deposited ZnS: ErF{sub}3David M. DeVito; Avni A. Argun; Evan Law; Mark R. Davidson; M. Puga-Lambers; Paul H. Holloway20072007, vol.25, no.2
Growth and electronic and magnetic properties of α-FeSe films on GaAs (001) substratesK. W. Liu; J. Y. Zhang; Binghui Li; Bingsheng Li; C. X. Shan; Youming Lu; Dezhen Shen20072007, vol.25, no.2
Sputtering yield measurements at glancing incidence using a quartz crystal microbalanceRobert D. Kolasinski; James E. Polk; Dan Goebel; Lee K. Johnson20072007, vol.25, no.2
Cryotrapping assisted mass spectrometry for the analysis of complex gas mixturesJose A. Ferreira; Francisco L. Tabares20072007, vol.25, no.2
Thinning of N-face GaN (0001) samples by inductively coupled plasma etching and chemomechanical polishingF. Rizzi; E. Gu; M. D. Dawson; I. M. Watson; R. W. Martin; X. N. Kang; G. Y. Zhang20072007, vol.25, no.2
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