中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术,A辑:真空、表面与膜
收藏年代2000~2013



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2006 2007 2008 2009 2010 2011
2012 2013

2007, vol.25, no.1 2007, vol.25, no.2 2007, vol.25, no.3 2007, vol.25, no.4 2007, vol.25, no.5 2007, vol.25, no.6

题名作者出版年年卷期
Residence times of water molecules on stainless steel and aluminum surfaces in vacuum and atmosphereR. Dobrozemsky; S. Menhart; K. Buchtela20072007, vol.25, no.3
Role of surface tension in copper electroplatingShih-Chieh Chang; Ying-Lang Wang; Chi-Cheng Hung; Wen-His Lee; Gwo-Jen Hwang20072007, vol.25, no.3
Effects of deposition parameters on the structure of AlN coatings grown by reactive magnetron sputteringAtul Khanna; Deepak G. Bhat20072007, vol.25, no.3
Combined filtered cathodic arc etching pretreatment-magnetron sputter deposition of highly adherent CrN filmsA. P. Ehiasarian; A. Anders; I. Petrov20072007, vol.25, no.3
Enhancement of thermal stability of Ta/Si(100) film by a Ta-Si interlayerD. C. Ahn; H. H. Lee; S. S. Kim; T. C. Kim; D. Y. Noh; D. H. Kim20072007, vol.25, no.3
Compound semiconductor bonded to AlN heat spreader substrate using graded intermediate layerK. Jagannadham20072007, vol.25, no.3
Femtomolar isothermal desorption using microhotplate sensorsAmol G. Shirke; Richard E. Cavicchi; Steve Semancik; Robert H. Jackson; Brian G. Frederick; M. Clayton Wheeled20072007, vol.25, no.3
Improvement of corrosion resistance of transparent conductive multilayer coating consisting of silver layers and transparent metal oxide layersKatsuhiko Koike; Fumiharu Yamazaki; Tomoyuki Okamura; Shin Fukuda20072007, vol.25, no.3
Reactive and anisotropic etching of magnetic tunnel junction films using pulse-time-modulated plasmaTomonori Mukai; Norikazu Ohshima; Hiromitsu Hada; Seiji Samukawa20072007, vol.25, no.3
Sealing ultralow K porous dielectrics with thin boron carbonitride filmsW. J. Ahearn; P. R. Fitzpatrick; J. G. Ekerdt20072007, vol.25, no.3
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