中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2010, vol.28, no.1 2010, vol.28, no.2 2010, vol.28, no.3 2010, vol.28, no.4 2010, vol.28, no.5 2010, vol.28, no.6

题名作者出版年年卷期
X-ray photoelectron spectroscopy study of polyimide thin films with Ar cluster ion depth profilingT. Miyayama; N. Sanada; M. Suzuki; J. S. Hammond; S.-Q. D. Si; A. Takahara20102010, vol.28, no.2
Modifying the composition of hydrogen-terminated silicon nanoparticles synthesized in a nonthermal rf plasmaJason Holm; Jeffrey T. Roberts20102010, vol.28, no.2
Photoconduction in silicon rich oxide films obtained by low pressure chemical vapor depositionJ. A. Luna-Lopez; M. Aceves-Mijares; J. Carrillo-Lopez; A. Morales-Sanchez20102010, vol.28, no.2
Coexistence of epitaxial Ta(111) and Ta(110) oriented magnetron sputtered thin film on c-cut sapphireS. Gnanarajan; S. K. H. Lam; A. Bendavid20102010, vol.28, no.2
Comparison of compressive and tensile relaxed composition-graded GaAsP and (Al)InGaP substratesM. J. Mori; S. T. Boles; E. A. Fitzgerald20102010, vol.28, no.2
Fast and smooth etching of indium tin oxides in BCl_3/Cl_2 inductively coupled plasmasH. B. Andagana; X. A. Cao20102010, vol.28, no.2
Influence of the magnetron on the growth of aluminum nitride thin films deposited by reactive sputteringG. F. Iriarte20102010, vol.28, no.2
In situ observation of change in surface atomic arrangement of Sc-O/W(100) system during phase transition at high temperatureT. Nagatomi; Y. Nakanishi; Y. Takai20102010, vol.28, no.2
Oxygen plasma damage to blanket and patterned ultralow-k surfacesJ. Bao; H. Shi; H. Huang; P. S. Ho; M. L. McSwiney; M. D. Goodner; M. Moinpour; G. M. Kloster20102010, vol.28, no.2
Rapid thermal annealing of ZnO thin films grown at room temperatureYoung Rae Jang; Keon-Ho Yoo; Seung Min Park20102010, vol.28, no.2
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