中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2010, vol.28, no.1 2010, vol.28, no.2 2010, vol.28, no.3 2010, vol.28, no.4 2010, vol.28, no.5 2010, vol.28, no.6

题名作者出版年年卷期
Initial growth stage evaluation of high quality ZnSe films deposited on glass substrateC. W. Huang; H. M. Weng; H. Y. Ueng20102010, vol.28, no.3
Highly piezoelectric AlN thin films grown on amorphous, insulating substratesAlvaro Artieda; Cosmin Sandu; Paul Muralt20102010, vol.28, no.3
Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputteringR. E. Sah; L. Kirste; M. Baeumler; P. Hiesinger; V. Cimalla; V. Lebedev; H. Baumann; H. E. Zschau20102010, vol.28, no.3
Angular distribution of atoms emitted from a SrZrO_3 target by laser ablation under different laser fluences and oxygen pressuresI. Konomi; T. Motohiro; H. Azuma; T. Asaoka; T. Nakazato; E. Sato; T. Shimizu; S. Fujioka; N. Sarukura; H. Nishimura20102010, vol.28, no.3
Enhanced retained dose uniformity in NiTi spinal correction rod treated by three-dimensional mesh-assisted nitrogen plasma immersion ion implantationQ. Y. Lu; T. Hu; Dixon T. K. Kwok; Paul K. Chu20102010, vol.28, no.3
Real-time spectroellipsometric characterization of nucleation, islanding, and coalescence behavior of boron films grown by soft x-ray excited chemical vapor depositionHousei Akazawa20102010, vol.28, no.3
Electrostatic quadrupole plasma mass spectrometer measurements during thin film depositions using simultaneous matrix assisted pulsed laser evaporation and magnetron sputteringC. N. Hunter; M. H. Check; C. Muratore; A. A. Voevodin20102010, vol.28, no.3
Highly conductive indium zinc oxide prepared by reactive magnetron cosputtering technique using indium and zinc metallic targetsT. K. Tsai; H. C. Chen; J. H. Lee; Y. Y. Huang; J. S. Fang20102010, vol.28, no.3
TiCN coatings deposited by large area filtered arc deposition techniqueY. H. Cheng; T. Browne; B. Heckerman20102010, vol.28, no.3
ZnO nanocrystals on SiO_2/Si surfaces thermally cleaned in ultrahigh vacuum and characterized using spectroscopic photoemission and low energy electron microscopyLeif K. E. Ericsson; Kjell O. Magnusson; Alexei A. Zakharov20102010, vol.28, no.3
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