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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2008, vol.26, no.1
2008, vol.26, no.2
2008, vol.26, no.3
2008, vol.26, no.4
2008, vol.26, no.5
2008, vol.26, no.6
题名
作者
出版年
年卷期
W chemical-vapor deposition using (i-C{sub}3H{sub}7C{sub}5H{sub}4){sub}2WH{sub}2
Atsushi Ogura; Satoshi Imai; Taihei Kagawa; Hirotaka Kurozaki; Masato Ishikawa; Ikuyo Muramoto; Hideaki Machida; Yoshio Ohshita
2008
2008, vol.26, no.4
Experiments and modeling of dual reactive magnetron sputtering using two reactive gases
T. Kubart; D. H. Trinh; L. Liljeholm; L. Hultman; H. Hogberg; T. Nyberg; S. Berg
2008
2008, vol.26, no.4
Study of electron beam evaporated compositionally modulated Fe/AI multilayers
R. Brajpuriya; S. Tripathi; A. Sharma; S. M. Chaudhari; T. Shripathi; N. Lakshmi
2008
2008, vol.26, no.4
Development of a cosputter-evaporation chamber for Fe-Ga films
N. A. Morley; S.-L. Yeh; S. Rigby; A. Javed; M. R. J. Gibbs
2008
2008, vol.26, no.4
Growth of InN on Si (111) by atmospheric-pressure metal-organic chemical vapor deposition using InN/AIN double-buffer layers
Zhen-Yu Li; Shan-Ming Lan; Wu-Yih Uen; Ying-Ru Chen; Meng-Chu Chen; Yu-Hsiang Huang; Chien-Te Ku; Sen-Mao Liao; Tsun-Neng Yang; Shing-Chung Wang; Gou-Chung Chi
2008
2008, vol.26, no.4
Characterization of molecular nitrogen in III-V compound semiconductors by near-edge x-ray absorption fine structure and photoemission spectroscopies
A. Bozanic; Z. Majlinger; M. Petravic; Q. Gao; D. Llewellyn; C. Crotti; Y.-W. Yang
2008
2008, vol.26, no.4
Mechanisms and selectivity for etching of HfO{sub}2 and Si in BCl{sub}3 plasmas
Chunyu Wang; Vincent M. Donnelly
2008
2008, vol.26, no.4
Classical size effect in oxide-encapsulated Cu thin films: Impact of grain boundaries versus surfaces on resistivity
Tik Sun; Bo Yao; Andrew P. Warren; Vineet Kumar; Scott Roberts; Katayun Barmak; Kevin R. Coffey
2008
2008, vol.26, no.4
Morphological analysis of TiB{sub}2 thin film prepared by rf magnetron sputtering
Wei Dai; Tongjun Zhang; Junyou Yang; Rongxing Sun; Juliang Xu
2008
2008, vol.26, no.4
X-ray photoelectron spectroscopy studies of water-induced surface reorganization of amphiphilic poly(2-hydroxyethyl methacrylate-g-dimethylsiloxane) copolymers using cryogenic sample handling techniques
Lu Chen; Daniel J. Hook; Paul L. Valint, Jr.; Joseph A. Gardella, Jr
2008
2008, vol.26, no.4
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