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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2008, vol.26, no.1
2008, vol.26, no.2
2008, vol.26, no.3
2008, vol.26, no.4
2008, vol.26, no.5
2008, vol.26, no.6
题名
作者
出版年
年卷期
Plasma-assisted atomic layer deposition of Ta{sub}2O{sub}5 from alkylamide precursor and remote O{sub}2 plasma
S. B. S. Heil; F. Roozeboom; M. C. M. van de Sanden; W. M. M. Kessels
2008
2008, vol.26, no.3
Dielectric properties of high-density-plasma fluorinated-silicate glass by doping nitrogen
B. J. Wei; Y. L. Cheng; Y. L. Wang; F. H. Lu; H. C. Shin
2008
2008, vol.26, no.3
Operational regimes of the saddle field plasma enhanced chemical vapor deposition system
Erik V. Johnson; Stefan Zukotynski; Nazir P. Kherani
2008
2008, vol.26, no.3
Multilayer transparent electrode consisting of silver alloy layer and metal oxide layers for organic luminescent electronic display device
Katsuhiko Koike; Shin Fukuda
2008
2008, vol.26, no.3
Mechanical properties of amorphous hydrogenated carbon films fabricated on polyethylene terephthalate foils by plasma immersion ion implantation and deposition
Jing Li; Xiubo Tian; Shiqin Yang; Paul K. Chu; Ricky K. Y. Fu
2008
2008, vol.26, no.3
Surface phase diagram and alloy formation for antimony on Au(110)
S. S. Parihar; P. F. Lyman
2008
2008, vol.26, no.3
Recombination probability of oxygen atoms on dynamic stainless steel surfaces in inductively coupled O{sub}2 plasmas
Luc Stafford; Joydeep Guha; Vincent M. Donnelly
2008
2008, vol.26, no.3
Role of chamber dimension in fluorocarbon based deposition and etching of SiO{sub}2 and its effects on gas and surface-phase chemistry
E. A. Joseph; B.-S. Zhou; S. P. Sant; L. J. Overzet; M. J. Goeckner
2008
2008, vol.26, no.3
Evolution of epitaxial Ta{sub}2O{sub}5 and Ta{sub}2O films during thermal oxidation of epitaxial tantalum films on sapphire substrates
S. Gnanarajan; S. K. H. Lam
2008
2008, vol.26, no.3
Tungsten atomic layer deposition on cobalt nanoparticles
C. A. Wilson; D. N. Goldstein; J. A. McCormick; A. W. Weimer; S. M. George
2008
2008, vol.26, no.3
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