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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2008, vol.26, no.1 2008, vol.26, no.2 2008, vol.26, no.3 2008, vol.26, no.4 2008, vol.26, no.5 2008, vol.26, no.6

题名作者出版年年卷期
W chemical-vapor deposition using (i-C{sub}3H{sub}7C{sub}5H{sub}4){sub}2WH{sub}2Atsushi Ogura; Satoshi Imai; Taihei Kagawa; Hirotaka Kurozaki; Masato Ishikawa; Ikuyo Muramoto; Hideaki Machida; Yoshio Ohshita20082008, vol.26, no.4
Experiments and modeling of dual reactive magnetron sputtering using two reactive gasesT. Kubart; D. H. Trinh; L. Liljeholm; L. Hultman; H. Hogberg; T. Nyberg; S. Berg20082008, vol.26, no.4
Study of electron beam evaporated compositionally modulated Fe/AI multilayersR. Brajpuriya; S. Tripathi; A. Sharma; S. M. Chaudhari; T. Shripathi; N. Lakshmi20082008, vol.26, no.4
Development of a cosputter-evaporation chamber for Fe-Ga filmsN. A. Morley; S.-L. Yeh; S. Rigby; A. Javed; M. R. J. Gibbs20082008, vol.26, no.4
Growth of InN on Si (111) by atmospheric-pressure metal-organic chemical vapor deposition using InN/AIN double-buffer layersZhen-Yu Li; Shan-Ming Lan; Wu-Yih Uen; Ying-Ru Chen; Meng-Chu Chen; Yu-Hsiang Huang; Chien-Te Ku; Sen-Mao Liao; Tsun-Neng Yang; Shing-Chung Wang; Gou-Chung Chi20082008, vol.26, no.4
Characterization of molecular nitrogen in III-V compound semiconductors by near-edge x-ray absorption fine structure and photoemission spectroscopiesA. Bozanic; Z. Majlinger; M. Petravic; Q. Gao; D. Llewellyn; C. Crotti; Y.-W. Yang20082008, vol.26, no.4
Mechanisms and selectivity for etching of HfO{sub}2 and Si in BCl{sub}3 plasmasChunyu Wang; Vincent M. Donnelly20082008, vol.26, no.4
Classical size effect in oxide-encapsulated Cu thin films: Impact of grain boundaries versus surfaces on resistivityTik Sun; Bo Yao; Andrew P. Warren; Vineet Kumar; Scott Roberts; Katayun Barmak; Kevin R. Coffey20082008, vol.26, no.4
Morphological analysis of TiB{sub}2 thin film prepared by rf magnetron sputteringWei Dai; Tongjun Zhang; Junyou Yang; Rongxing Sun; Juliang Xu20082008, vol.26, no.4
X-ray photoelectron spectroscopy studies of water-induced surface reorganization of amphiphilic poly(2-hydroxyethyl methacrylate-g-dimethylsiloxane) copolymers using cryogenic sample handling techniquesLu Chen; Daniel J. Hook; Paul L. Valint, Jr.; Joseph A. Gardella, Jr20082008, vol.26, no.4
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