中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2008, vol.26, no.1 2008, vol.26, no.2 2008, vol.26, no.3 2008, vol.26, no.4 2008, vol.26, no.5 2008, vol.26, no.6

题名作者出版年年卷期
Research on metastable electron traps in the modified SOI materials induced by Si ion implantationEnxia Zhang; Zhishui Yu; Yanggen Cao; Hui Yang; Zhengxuan Zhang; Xi Wang20082008, vol.26, no.2
Crystallographic texture, morphology, optical, and microwave dielectric properties of dc magnetron sputtered nanostructured zirconia thin filmsD. Pamu; K. Sudheendran; M. Ghanashyam Krishna; K. C. James Raju20082008, vol.26, no.2
First principles calculation of Stillinger-Weber potential parameters for InNC. Fulk; W. Walkosz; A. Chatterjee; S. Ogut; C. H. Grein; P. W. Chung20082008, vol.26, no.2
Synthesis and characterization of Al{sub}2O{sub}3 and SiO{sub}2 films with fluoropolymer content using rf-plasma magnetron sputtering techniqueMohammad Islam; Osman T. Inal20082008, vol.26, no.2
Etching characteristics and mechanism of Ge{sub}2Sb{sub}2Te{sub}5 thin films in inductively coupled Cl{sub}2/Ar plasmaNam-Ki Min; Alexander Efremov; Yun-Ho Kim; Mansu Kim; Hyung-Ho Park; Hyun Woo Lee; Kwang-Ho Kwon20082008, vol.26, no.2
Dimerization of titanyl phthalocyanine in thin films prepared by surface polymerization by ion-assisted depositionAdam M. Zachary; Martin Drabik; Yongsoo Choi; Igor L. Bolotin; Hynek Biederman; Luke Hanley20082008, vol.26, no.2
Luminescence enhancement of plasma-etched InAsP/InGaAsP quantum wellsMeng Cao; Yanfeng Lao; Huizhen Wu; Cheng Liu; Zhengsheng Xie; Chunfang Cao; Huizhen Wu20082008, vol.26, no.2
Effect of growth temperature on the characteristics of ZnO films grown on Si(111) substrates by metal-organic chemical vapor depositionJunjie Zhu; Ran Yao; Haiyan Song; Zhuxi Fu; A. Yu. Kuznetsov; In-Hwan Lee20082008, vol.26, no.2
Rarefied gas flow through short tubes into vacuumS. Varoutis; D. Valougeorgis; O. Sazhin; F. Sharipov20082008, vol.26, no.2
Study of a micro chamber quadrupole mass spectrometerJinchan Wang; Xiaobing Zhang; Fuming Mao; Mei Xiao; Yunkang Cui; Daniel den Engelsen; Wei Lei20082008, vol.26, no.2
123



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024