中国机械工程学会生产工程分会知识服务平台

期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2008, vol.26, no.1 2008, vol.26, no.2 2008, vol.26, no.3 2008, vol.26, no.4 2008, vol.26, no.5 2008, vol.26, no.6

题名作者出版年年卷期
Magnetron sputtered Si-B-C-N films with high oxidation resistance and thermal stability in air at temperatures above 1500℃Jaroslav Vlcek; Stanislav Hreben; Jiri Kalas; Jiri Capek; Petr Zeman; Radomir Cerstvy; Vratislav Perina; Yuichi Setsuhara20082008, vol.26, no.5
Investigation of the suppression effect of polyethylene glycol on copper electroplating by electrochemical impedance spectroscopyChi-Cheng Hung; Wen-Hsi Lee; Ying-Lang Wang; Din-Yuen Chan; Gwo-Jen Hwang20082008, vol.26, no.5
Silane injection in a high-density low-pressure plasma system and its influence on the deposition kinetics and material properties of O{sub}2R. Botha; B. Haj Ibrahim; P. Bulkin; B. Drevillon20082008, vol.26, no.5
Low energy secondary ion mass spectrometry with sub-keV O{sub}2{sup}+ beams at glancing incidenceZ. X. Jiang; K. Kim; T. Guenther; B. Robichaud; J. Benavides; L. Contreras; D. D. Sieloff20082008, vol.26, no.5
Measurement of reactive and condensable gas permeation using a mass spectrometerXiao Dong Zhang; Jay S. Lewis; Charles B. Parker; Jeffrey T. Glass; Scott D. Wolter20082008, vol.26, no.5
Identification and quantification of iron silicide phases in thin filmsD. R. Miquita; J. C. Gonzalez; M. I. N. da Silva; W. N. Rodrigues; M. V. B. Moreira; R. Paniago; R. Ribeiro-Andrade; R. Magalhaes-Paniago; H. -D. Pfannes; A. G. de Oliveira20082008, vol.26, no.5
Structure and mechanical properties of diamondlike carbon films produced by hollow-cathode plasma depositionH. F. Jiang; X. B. Tian; S. Q. Yang; R. K. Y. Fu; P. K. Chu20082008, vol.26, no.5
Wafer heating mechanisms in a molecular gas, inductively coupled plasma: in situ, real time wafer surface measurements and three-dimensional thermal modelingM. J. Titus; D. B. Graves20082008, vol.26, no.5
Capillary flow meter for calibrating spinning rotor gaugesRobert F. Berg20082008, vol.26, no.5
Reduction in hydrogen outgassing from stainless steels by a medium-temperature heat treatmentC. D. Park; S. M. Chung; Xianghong Liu; Yulin Li20082008, vol.26, no.5
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